SW-6500D型多晶硅过程气体分析系统

系统介绍

SW-6500D型多晶硅过程气体分析系统可连续监测工业硅提纯的三氯氢硅氢还原工艺中氢气的氧含量和微水含量以及在尾气管道保护气氮气的氧含量和微水含量，从而保证{zh1}提炼超纯硅的品质。

系统特点

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         取样探头为可插拔式探头，方便更换滤芯

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         过滤器可过粉尘和硅粉，过滤精度为0.3μm

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         大屏幕现场就地显示

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         采用进口陶瓷阻抗式露点分析仪

技术参数

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         型号：SW-6500D

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         信号输出：4-20 mA输出

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         响应时间：T90<30s

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         工作温度：-20º~+60º

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         电源：220 VAC

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         防护等级：IP65

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         系统部件：316L不锈钢

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         防爆标准：符合EEx ia IIC T4

微量水分析仪：

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         测量范围：+20~ -100℃

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         精度：+20~-60℃ 露点范围内为±1º

-60~-100℃ 露点范围内为±2º

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         工作压力：真空~40 MPa

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         防爆标准：非现场显示型符合EEx ia IIC T4

氧含量分析仪：

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         测量范围：0-25%（量程任选）

0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11>         精度：<1%FS