SW-6500D型多晶硅过程气体分析系统
系统介绍
SW-6500D型多晶硅过程气体分析系统可连续监测工业硅提纯的三氯氢硅氢还原工艺中氢气的氧含量和微水含量以及在尾气管道保护气氮气的氧含量和微水含量，从而保证{zh1}提炼超纯硅的品质。
系统特点
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 取样探头为可插拔式探头，方便更换滤芯
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 过滤器可过粉尘和硅粉，过滤精度为0.3μm
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 大屏幕现场就地显示
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 采用进口陶瓷阻抗式露点分析仪
技术参数
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 型号：SW-6500D
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 信号输出：4-20 mA输出
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 响应时间：T90<30s
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 工作温度：-20º~+60º
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 电源：220 VAC
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 防护等级：IP65
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 系统部件：316L不锈钢
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 防爆标准：符合EEx ia IIC T4
微量水分析仪：
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 测量范围：+20~ -100℃
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 精度：+20~-60℃ 露点范围内为±1º
-60~-100℃ 露点范围内为±2º
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 工作压力：真空~40 MPa
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 防爆标准：非现场显示型符合EEx ia IIC T4
氧含量分析仪：
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 测量范围：0-25%（量程任选）
0 && image.height>0){if(image.width>=700){this.width=700;this.height=image.height*700/image.width;}}" height=11 alt=* src="file:///C:/DOCUME~1/ADMINI~1/LOCALS~1/Temp/msohtml1/01/clip_image001.gif" width=11> 精度：<1%FS
