< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>激光系统> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>型号规格> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>LT7130> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>LT5110> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>LT> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>LT3100> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>激光波长> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1064nm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1064nm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1064nm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1064nm> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>激光功率> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>10W> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>10W> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>10W> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>10W> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>典型光斑尺寸> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>35±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>35±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>35±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>40±5μm> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>焦方式> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动,计算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动,计算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动,计算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>冷却方式> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>风冷> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>风冷> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>风冷> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>风冷> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>激光束定位系统> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>激光束运动范围> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>60mm X 60mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>60mm X 60mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>60mm X 60mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>100mm X 100mm> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>运动分辨率> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.76μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.76μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.76μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1.5μm> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>重复定位精度> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±2.5μm> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±10μm> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>分步重复运动系统> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>运动方式> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>空气悬浮运动,无擦力> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>精密闭环XY平台> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>精密闭环XY平台> | < cl=MoNorml tyle="MRGIN: 0cm 0cm 0t">&nb;> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>运动范围> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>290mm*260mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>300mm*300mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>300mm*300mm> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>重复定位精度> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±1μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±10μm> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>{zd0}运动速度(空载)> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>900mm/> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>180mm/> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>180mm/> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>测量系统> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>电阻测量方式> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>四线测量或二线测量> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>四线测量或二线测量> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>四线测量或二线测量> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>四线测量或二线测量> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>电阻测量精度> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>中阻 ± 0.02%> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>中阻 ± 0.05%> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>中阻 ± 0.05%> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>中阻 ± 0.05%> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>电阻测量范围> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.1Ω-100MΩ> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.1Ω-100MΩ> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.1Ω-100MΩ> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.1Ω-100MΩ> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>测量速度> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>25μ/次> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>25μ/次> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>25μ/次> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>25μ/次> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>零点及满程误差校正> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动校正> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动校正> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动校正> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动校正> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>探针定义> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>可编程任意设定> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>可编程任意设定> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>可编程任意设定> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>可编程任意设定> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>探针板运动> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动,计算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动,计算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>动,计算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>气缸驱动或动> |