科学网-半导体业界的HKMG攻防战：详解两大工艺流派之争企业库|免费b2b网站

科学网-半导体业界的HKMG攻防战：详解两大工艺流派之争

闅忕潃鏅朵綋绠″昂瀵哥殑涓嶆柇缂╁皬锛孒KMG锛坔igh-k缁濈紭灞?閲戝睘鏍呮瀬锛夋妧鏈嚑涔庡凡缁忔垚涓?5nm浠ヤ笅绾у埆鍒剁▼鐨勫繀澶囨妧鏈?涓嶈繃鍦ㄥ埗浣淗KMG缁撴瀯鏅朵綋绠＄殑宸ヨ壓鏂归潰锛屼笟鍐呭嵈瀛樺湪涓ゅぇ鍚勮嚜鍥烘墽宸辫鐨勪笉鍚岄樀钀ワ紝鍒嗗埆鏄互IBM涓轰唬琛ㄧ殑Gate-first宸ヨ壓娴佹淳鍜屼互Intel涓轰唬琛ㄧ殑Gate-last宸ヨ壓娴佹淳锛屽敖绠′袱澶ч樀钀ュ潎鑷О鍙湁鑷繁鐨勫伐鑹烘墠鏄渶閫傚悎鍒朵綔HKMG鏅朵綋绠＄殑鎶€鏈紝浣嗕竴鑸潵璇翠娇鐢℅ate-first宸ヨ壓瀹炵幇HKMG缁撴瀯鐨勯毦鐐瑰湪浜庡浣曟帶鍒?PMOS绠＄殑Vt鐢靛帇锛堥棬闄愮數鍘嬶級锛涜€孏ate-last宸ヨ壓鐨勯毦鐐瑰垯鍦ㄤ簬宸ヨ壓杈冨鏉傦紝鑺墖鐨勭鑺瘑搴﹀悓绛夋潯浠朵笅瑕佹瘮Gate-first宸ヨ壓浣庯紝闇€瑕佽 璁℃柟绉瀬閰嶅悎淇敼鐢佃矾璁捐鎵嶅彲浠ヨ揪鍒颁笌Gate-first宸ヨ壓鐩稿悓鐨勭鑺瘑搴︾骇鍒€? HKMG瀹炵幇宸ヨ壓鐨勪袱澶ф祦娲撅細 Gate-last闃佃惀锛氱洰鍓嶅凡缁忚〃鎬佹敮鎸丟ate-last宸ヨ壓鐨勯櫎浜咺ntel鍏徃涔嬪锛堜粠45nm鍒剁▼寮€濮嬶紝Intel渚夸竴鐩村湪鍒朵綔HKMG鏅朵綋绠℃椂浣跨敤Gate-last宸ヨ壓锛夛紝涓昏杩樻湁鑺墖浠ｅ伐涓氱殑鏈€澶у法澶村彴绉數锛屽悗鑰呮槸鏈€杩戞墠鍐冲畾鍦ㄤ粖骞存帹鍑虹殑28nm HKMG鍒剁▼浜у搧涓惎鐢℅ate-last宸ヨ壓锛堟湁鍏冲唴瀹硅瑙佽繖涓摼鎺ワ級銆? Gate-first闃佃惀锛欸ate-first宸ヨ壓鏂归潰锛屾敮鎸佽€呬富瑕佹槸浠BM涓洪鐨勮姱鐗囧埗閫犳妧鏈仈鐩?Fishkill Alliance鐨勬墍灞炴垚鍛橈紝鍖呮嫭IBM锛岃嫳椋炲噷锛孨EC锛孏lobalFoundries, 涓夋槦,鎰忔硶鍗婂浣撲互鍙婁笢鑺濈瓑鍏徃锛屽敖绠¤鑱旂洘鐩墠杩樻病鏈夋寮忔帹鍑哄熀浜嶩KMG鎶€鏈殑鑺墖浜у搧锛屼絾杩欎簺鍏徃璁″垝鑷冲皯鍦?2/28nm HKMG绾у埆鍒剁▼涓細缁х画浣跨敤Gate-first宸ヨ壓锛屼笉杩囨渶杩戞湁娑堟伅浼犳潵绉拌仈鐩熶腑鐨勬垚鍛樹笁鏄熷垯宸茬粡鍦ㄧ瀵嗙爺鍒禛ate-last宸ヨ壓锛堟湁鍏冲唴瀹硅瑙佽繖涓摼鎺ワ級銆傚彟澶栵紝鍙版咕鑱旂數鍏徃鐨凥KMG宸ヨ壓鏂规鍒欒緝涓虹壒娈婏紝鍦ㄥ埗浣淣MOS绠＄殑HKMG缁撴瀯鏃讹紝浠栦滑浣跨敤Gate-first宸ヨ壓锛岃€屽埗浣淧MOS绠℃椂锛屼粬浠垯浼氫娇鐢℅ate-last宸ヨ壓銆? HKMG鐨勪紭鍔垮拰缂虹偣锛? 浼樺娍锛氫笉绠′娇鐢℅ate-first鍜孏ate-last鍝竴绉嶅伐鑹猴紝鍒堕€犲嚭鐨刪igh-k缁濈紭灞傚鎻愬崌鏅朵綋绠＄殑鎬ц兘鍧囨湁閲嶅ぇ鐨勬剰涔夈€俬igh-k鎶€鏈笉浠呰兘澶熷ぇ骞呭噺灏忔爡鏋佺殑婕忕數閲忥紝鑰屼笖鐢变簬high-k缁濈紭灞傜殑绛夋晥姘у寲鐗╁帤搴︼紙EOT:equivalent oxide thickness锛夎緝钖勶紝鍥犳杩樿兘鏈夋晥闄嶄綆鏍呮瀬鐢靛銆傝繖鏍锋櫠浣撶鐨勫叧閿昂瀵镐究鑳藉緱鍒拌繘涓€姝ョ殑缂╁皬锛岃€岀瀛愮殑椹卞姩鑳藉姏涔熻兘寰楀埌鏈夋晥鐨勬敼鍠勩€? 缂虹偣锛氫笉杩囬噰鐢╤igh-k缁濈紭灞傜殑鏅朵綋绠′笌閲囩敤纭呮哀鍖栫墿缁濈紭灞傜殑鏅朵綋绠＄浉姣旓紝鍦ㄦ敼鍠勬矡閬撹浇娴佸瓙杩佺Щ鐜囨柟闈㈢◢鏈変笉鍒┿€? Gatefirst/Gatelast鐨勪紭缂虹偣宸埆鍒嗘瀽涓庢湭鏉ュ簲鐢ㄧ姸鍐碉細涓嶈繃锛岄噰鐢℅ate-first宸ヨ壓鍒朵綔HKMG缁撴瀯鏃跺嵈鏈変竴浜涢毦棰橀渶瑕佽В鍐炽€備竴浜涗笓瀹惰涓猴紝濡傛灉閲囩敤Gate-first宸ヨ壓鍒朵綔HKMG,閭ｄ箞鐢变簬鐢ㄦ潵鍒朵綔high-k缁濈紭灞傚拰鍒朵綔閲戝睘鏍呮瀬鐨勬潗鏂欏繀椤荤粡鍙楁紡婧愭瀬閫€鐏伐姝ョ殑楂樻俯锛屽洜姝や細瀵艰嚧PMOS绠t闂ㄩ檺鐢靛帇鐨勪笂鍗囷紝杩欐牱渚垮奖鍝嶄簡绠″瓙鐨勬€ц兘銆傝€屾寔涓嶅悓瑙傜偣鐨勪笓瀹讹紝鍖呮嫭GlobalFoundries鍏徃鐨勬妧鏈€荤洃John Pellerin绛変汉鍒欏己璋僄ate-first宸ヨ壓涓嶉渶瑕佺數璺璁℃柟鍦ㄧ數璺璁′笂鍋氬お澶氭洿鏀癸紝鑰屼笖鎬ц兘涓婁篃瀹屽叏鑳藉婊¤冻32/28nm鑺傜偣鍒剁▼鐨勮姹傘€? Pellerin 寮鸿皟锛氣€滄垜浠偗瀹氫細鍦?8nm鑺傜偣鍒剁▼涓婁娇鐢℅ate-first宸ヨ壓銆傚叾鍘熷洜鏄垜浠殑瀹㈡埛甯屾湜鍦ㄨ浆鎹㈠埌HKMG缁撴瀯鏃惰兘澶熷敖閲忛伩鍏嶈繃澶氱殑璁捐鍙樻洿銆傗€? 鑰屽彴绉數鐨勬妧鏈珮绠¤拫灏氫箟鍒欒〃绀猴紝绫讳技鐨勯毦棰樹笟鐣屽湪20骞村墠渚挎浘缁忕粡鍘嗚繃锛氣€滃綋鏃朵笟鐣屽悓鏍锋浘缁忓彂鐜癗+鎺烘潅鐨凱MOS鏍呮瀬鏉愭枡浼氶€犳垚Vt鐢靛帇杈冮珮锛岃繖鏍蜂笟鍐呬竴浜涘叕鍙镐究寮€濮嬪悜娌熼亾涓幒鏉傛潅璐ㄤ互鍘嬩綆Vt锛岀粨鏋滃嵈甯︽潵浜嗗緢澶氬壇浣滅敤锛屾瘮濡傞€犳垚鐭€氶亾鏁堝簲鏇翠负鏄庢樉绛夌瓑銆傗€濊€岀洰鍓嶄娇鐢℅ate-first宸ヨ壓鍒朵綔HKMG鏅朵綋绠＄殑鏂规鐨勬儏鍐靛垯涓庢闈炲父绫讳技锛屽敖绠′汉浠彲浠ラ噰鐢ㄥ姞鍏ヤ笂瑕嗗眰绛夋柟寮忔潵鏀瑰杽Gate-first宸ヨ壓瀹规槗閫犳垚Vt杩囬珮鐨勯棶棰橈紝浣嗘槸鍔犲叆涓婅灞傜殑宸ヨ壓鍗撮潪甯稿鏉傚拰闅句簬鎺屾彙銆傚洜姝ゅ彴绉數骞茶剢閫夋嫨杞悜Gate-last宸ヨ壓锛屼笉杩嘒ate-last宸ヨ壓瀹炴柦鏃跺鏋滄兂淇濇寔涓嶨ate-first宸ヨ壓浜у搧鐨勭鑺瘑搴﹁繎浼硷紝闇€瑕佽璁℃柟瀵圭數璺疞ayout杩涜閲嶆柊璁捐锛堟湁鍏冲彴绉數鍏徃杞悜Gate-last宸ヨ壓鐨勮缁嗕粙缁嶏紝璇风偣鍑昏繖涓摼鎺ユ煡鐪嬨€傦級涓撳鎰忚锛? 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